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Structure and electrochromic properties of WO3 thin films by direct current, pulsed direct current, and radio frequency magnetron sputtering from metallic and ceramic targets

Materials ScienceMaterials EngineeringMaterial AnalysisEngineeringFerroelectric ApplicationOxide ElectronicsSurface ScienceApplied PhysicsWo3 Thin FilmsRadio Frequency MagnetronThin FilmsMicroelectronicsCeramic TargetsThin Film Processing