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Optimization of residual stresses inside diamond thin films grown by hot filament chemical vapor deposition (HFCVD)

Materials ScienceMaterials EngineeringDiamond-like CarbonEngineeringDiamond Thin FilmsApplied PhysicsResidual StressesResidual StressThin FilmsChemical Vapor DepositionMechanics Of MaterialsMicrostructureThin Film Processing