Mechanistic difference between Si-face and C-face polishing of 4H–SiC substrates in aqueous and non-aqueous slurries

Juanfen Shen, Haibo Chen, Jiapeng Chen, Lin Lin, Yunyun Gu, Zhenlin Jiang, Jun Li, Tao Sun

Ceramics International · 2022 · 44 citations · 40 references

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