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Effect of nitrogen partial pressure on the piezoresistivity of magnetron sputtered ITO thin films at high temperatures

Materials ScienceMagnetismMaterial AnalysisEngineeringPhysicsSurface ScienceApplied PhysicsCondensed Matter PhysicsNitrogen Partial PressureIto Thin FilmsHigh TemperaturesMagnetic Thin FilmsThin FilmsThin Film Processing