Publication | Open Access

Structural, optical, and electrical properties of TiO2 thin films deposited by ALD: Impact of the substrate, the deposited thickness and the deposition temperature

Materials ScienceOptical MaterialsEngineeringOxide ElectronicsSurface ScienceApplied PhysicsThin FilmsTio2 Thin FilmsChemical DepositionElectrical PropertiesDeposition TemperatureChemical Vapor DepositionThin Film Processing