Light Source for 21st Century: New Application by a Lamp (by Excimer Lamp)

Nobuyuki Hishinuma

Journal of Plasma and Fusion Research · 2005 · 12 citations · 1 references

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Concepts

Abstract

There are many lamp applications according to each spectrum characteristics. Ultraviolet radiation lamp is used for lithography, curing and medicals. In this paper, Excimer lamp is introduced and its applications are described.

References

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