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Design, modeling, and test of a normal-stressed electromagnetic actuated compliant nano-positioning stage

Materials ScienceEngineeringSoft RoboticsMechanical DesignMechanicsMechanical EngineeringMechatronicsMechanical SystemsNano Electro Mechanical SystemCompliant Nano-positioning StageActuationElectronic-mechanical SystemMicroactuatorStructural MechanicsMicro-electromechanical System