Chemical Vapor Deposition of Edge-on Oriented 2D Conductive Metal–Organic Framework Thin Films

Abstract

We demonstrated the synthesis of a conductive two-dimensional metal-organic framework (MOF) thin film by single-step all-vapor-phase chemical vapor deposition (CVD). The synthesized large-area thin film of Cu₃(C₆O₆)₂ has an edge-on-orientation with high crystallinity. Cu₃(C₆O₆)₂ thin film-based microdevices were fabricated by e-beam lithography and had an electrical conductivity of 92.95 S/cm. Synthesis of conductive MOF thin films by the all-vapor-phase CVD will enable fundamental studies of physical properties and may help to accomplish practical applications of conductive MOFs.