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In-situ Ar plasma treatment as a low thermal budget technique for high performance InGaSnO thin film transistors fabricated using magnetron sputtering

Materials ScienceElectrical EngineeringPlasma ElectronicsEngineeringNanoelectronicsApplied PhysicsMagnetron SputteringSemiconductor Device FabricationGas Discharge PlasmaMicroelectronicsOptoelectronicsPlasma ProcessingPlasma Application