Improving The Reliability of The Multiline TRL Calibration Algorithm

Abstract

This paper presents an updated version of the multiline Thru-Reflect-Line (mTRL) calibration algorithm. The proposed approach formulates the calibration problem in a single eigenvalue problem, in which all line standards are combined using an optimally derived weighting matrix. This approach eliminates the need for common line selection and line pairing procedures, as documented in MultiCal [1], [2]. Using on-wafer measurements up to 150 GHz and sensitivity analysis based on the Monte Carlo method, we show that this new approach outperforms the MultiCal implementation and delivers consistent results in the presence of additive noise and phase error.