Publication | Closed Access
Phase-pure antiferroelectric AgNbO<sub>3</sub> films on Si substrates: chemical solution deposition and phase transitions
24
Citations
54
References
2022
Year
Phase TransitionsEngineeringChemical DepositionChemical EngineeringCa AdditivesEpitaxial GrowthThin Film ProcessingMaterials ScienceMaterials EngineeringNanotechnologySi SubstratesChemical Solution DepositionSemiconductor MaterialRoom TemperatureMaterial AnalysisSurface ScienceApplied PhysicsM 2Thin FilmsChemical Vapor Deposition
An easy-to-implement chemical solution deposition route using EG and CA additives is demonstrated to fabricate phase-pure AgNbO 3 films on Pt/Ti/SiO 2 /Si substrates, where the films show an M 2 antiferroelectric phase at room temperature.
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