Concepedia

Effect of silicon-based substrates and deposition type on sputtered AlN thin films: Physical & chemical properties and suitability for piezoelectric device integration

M.A. Signore, L. Velardi, Chiara De Pascali, Iren Kuznetsova, Laura Blasi, Francesco Biscaglia, F. Quaranta, Pietro Siciliano, Luca Francioso

Applied Surface Science · 2022 · 15 citations · 30 references

DOI

Concepts

References

30

Advances in piezoelectric thin films for acoustic biosensors, acoustofluidics and lab-on-chip applications

Yongqing Fu, Jikui Luo, Nam‐Trung Nguyen et al. · Progress in Materials Science · 2017 · 616 citations · Full text

Raman spectroscopy of GaN, AlGaN and AlN for process and growth monitoring/control

Martin Kuball · Surface and Interface Analysis · 2001 · 379 citations

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Piezoelectric coefficient of aluminum nitride and gallium nitride

C. M. Lueng, H. L. W. Chan, C. Surya et al. · Journal of Applied Physics · 2000 · 223 citations · Full text

, , +13

Raman-scattering studies of aluminum nitride at high pressure

P. Perlin, A. Polian, T. Suski · Physical review. B, Condensed matter · 1993 · 141 citations

, , +13

Effect of scandium content on structure and piezoelectric properties of AlScN films deposited by reactive pulse magnetron sputtering

O. Zywitzki, Thomas Modes, S. Barth et al. · Surface and Coatings Technology · 2016 · 96 citations

, , +7