Publication | Closed Access

New chemical pathway for large-area deposition of doped diamond films by linear antenna microwave plasma chemical vapor deposition

Materials ScienceNew Chemical PathwayChemical EngineeringEngineeringNanotechnologyMaterials FabricationSurface ScienceApplied PhysicsLinear AntennaChemical DepositionChemical Vapor DepositionPlasma ProcessingDoped Diamond Films