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Influencing mechanisms of deposition bias voltage on superlubricious a-C:H films: Key role of nanoclustering structures in controlling structural evolution of transfer film

Materials ScienceTransfer FilmEngineeringPhysicsNanotechnologyNanoelectronicsApplied PhysicsDeposition Bias VoltageVacuum DeviceChemical DepositionH FilmsChemical Vapor DepositionThin Film Processing