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Ar Cluster Sputtering of Polymers: Effects of Cluster Size and Molecular Weights
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2014
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EngineeringNuclear PhysicsMolecular WeightsCluster AtomIon EmissionYield VolumePolymer ChemistryCluster SizeMaterials ScienceMaterials EngineeringCluster SciencePhysicsAtomic PhysicsPolymer SolutionNatural SciencesPolymer ScienceApplied PhysicsSurface ScienceCluster ChemistryPolymer ModelingAr Cluster Sputtering
Figure 2. Sputtering yield volume per cluster atom, Y/n, versus energy per atom, E/n, for PS (a) and PMMA (b) under 10-keV Ar n + bombardment with cluster size in the range 1300-7000 atoms/ion.