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Ar Cluster Sputtering of Polymers: Effects of Cluster Size and Molecular Weights

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2014

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Abstract

Figure 2. Sputtering yield volume per cluster atom, Y/n, versus energy per atom, E/n, for PS (a) and PMMA (b) under 10-keV Ar n + bombardment with cluster size in the range 1300-7000 atoms/ion.