Influence of substrate properties on the growth of titanium films. Part I

Stresses in thin films: The relevance of grain boundaries and impurities

R. W. Hoffman · Thin Solid Films · 1976 · 462 citations

Natural Sciences, Materials Engineering, Materials Science +14

The intrinsic stress of polycrystalline and epitaxial thin metal films

R. Koch · Journal of Physics Condensed Matter · 1994 · 449 citations

Natural Sciences, Materials Engineering, Materials Science +16

Structure and internal stress in ultra-thin silver films deposited on MgF2 and SiO substrates

R. Abermann, R. Kramer, J. Mäser · Thin Solid Films · 1978 · 135 citations

Natural Sciences, Materials Engineering, Materials Science +15

Internal stress and structure of ultrahigh vacuum evaporated chromium and iron films and their dependence on substrate temperature and oxygen partial pressure during deposition

Gudrun C. Thurner, R. Abermann · Thin Solid Films · 1990 · 95 citations

Natural Sciences, Materials Engineering, Materials Science +17

A UHV-compatible thin-film stress-measuring apparatus based on the cantilever beam principle

R. Koch, H. Leonhard, Gudrun C. Thurner et al. · Review of Scientific Instruments · 1990 · 51 citations

Natural Sciences, Materials Engineering, Materials Science +17