Optimization of electromechanical coupling for a thin-film PZT membrane: I. Modeling - Concepedia

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Optimization of electromechanical coupling for a thin-film PZT membrane: I. Modeling

88

Citations

25

References

2005

Year

J Cho, Michael Anderson, R. F. Richards, David F. Bahr, C. D. Richards

Journal of Micromechanics and Microengineering

Device ModelingMaterials ScienceMembrane StructureMembrane FormationEngineeringApplied PhysicsThin-film Pzt MembraneThin FilmsElectromechanical Coupling

References

	Year	Citations

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