Japanese Journal of Applied Physics · 1990 · 17 citations · 10 references
Natural SciencesMaterials EngineeringMaterials ScienceCrystal StructureMaterials ChemistryThin FilmsCrystal ChemistryEpitaxial GrowthMetalsSurface PhysicsThin-film DepositionThin-film MaterialsFilm Growth MechanismsHydrogenationLattice Parameter AnalysisLattice Parameter DeterminationLattice Parameter MeasurementReflection High-energy Electron DiffractionThin-film Growth KineticsThin-film Growth Mechanisms
The growth and structure of Ti films evaporated on ultra-high-vacuum- and air-cleaved NaCl substrates at room temperature have been studied by reflection high-energy electron diffraction. The 2 nm-thick film on the former showed bcc- and CaF 2 -type (TiH 1.5 ) reflections while that on the latter showed TiH 1.5 ones immediately after the evaporation. Judging from the lattice parameter (0.33 nm), the bcc crystallite was analyzed to be β-Ti. This is the first observation of β-Ti grown in evaporated Ti films. The β-Ti changed into TiH 1.5 with time. This spontaneous hydrogenation mechanism of the evaporated Ti films is discussed.
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