Aluminium nitride: review of synthesis methods

Abstract

Several technologies have been reported for the synthesis of AlN. These are reviewed and described in detail. The processes are classified according to the principle of synthesis, and the AlN product characteristics for each method of synthesis are identified. Only two of the methods reported, direct nitridation and carbothermal reduction, are currently used industrially. Due to the requirement for higher quality AlN powders, several other methods are being developed. The level of development, the principle of synthesis, the raw materials used, the reaction products, and the powder characteristics of the synthesis methods are discussed. Where appropriate, environmental or safety concerns are identified. Process flowcharts for each of the technologies were developed on the basis of information available.MST/1794