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Micro-crack defects detection of semiconductor Si-wafers based on Barker code laser infrared thermography

Barker Code LaserEngineeringCrystalline DefectsInfrared SensorApplied PhysicsDefect FormationSemiconductor Device FabricationMicro-crack Defects DetectionSemiconductor Si-wafersDefect ToleranceOptoelectronicsSilicon DebuggingMicroelectronics