Publication | Closed Access
Machine-learning-enabled geometric compliance improvement in two-photon lithography without hardware modifications
17
Citations
54
References
2022
Year
Photonic DevicePhotonicsEngineeringBeam LithographyOptical ComputingOptical PropertiesApplied PhysicsComputer EngineeringComputer-aided DesignTwo-photon LithographyOptoelectronics3D PrintingProgrammable PhotonicsNanolithography Method
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