Publication | Closed Access
Conductive SnO2-x thin films deposited by thermal ALD with H2O reactant
17
Citations
24
References
2022
Year
Materials ScienceEngineeringH2o ReactantOxide ElectronicsSurface ScienceApplied PhysicsThermal ConductivityThin FilmsChemical Vapor DepositionThin Film ProcessingThermal Ald
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