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Comparative study of structural and stoichiometric properties of titanium nitride films deposited by cathodic cage plasma deposition and magnetron sputtering

Materials ScienceMaterials EngineeringBoron NitrideEngineeringSurface ScienceApplied PhysicsMagnetron SputteringTitanium Nitride FilmsChemical DepositionComparative StudyThin Film Processing