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Large enhancement of ferroelectric polarization in Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub> films by low plasma energy pulsed laser deposition

26

Citations

35

References

2021

Year

Abstract

PLD of ferroelectric HfO 2 done under a mixed Ar and O 2 atmosphere allows the reduction of the PLD plasma energy, resulting in fewer defects and an increase of the ferroelectric polarization of around 50% compared to films grown by conventional PLD.

References

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