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Comparative study on the nanomechanical behavior and physical properties influenced by the epitaxial growth mechanisms of GaN thin films

Materials ScienceEpitaxial GrowthEngineeringNanotechnologyEpitaxial Growth MechanismsApplied PhysicsAluminum Gallium NitrideGan Power DeviceThin FilmsMolecular Beam EpitaxyCategoryiii-v SemiconductorComparative StudyGan Thin Films