The influence of backgrinding on the fracture strength of 100 mm diameter (1 1 1) p-type silicon wafers - Concepedia

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The influence of backgrinding on the fracture strength of 100 mm diameter (1 1 1) p-type silicon wafers

21

Citations

5

References

1997

Year

K. McGuire, S. Danyluk, T. Baker, J. W RUPNOW, D.W. McLaughlin

Journal of Materials Science

References

	Year	Citations

Page 1