A Training Concept Based on a Digital Twin for a Wafer Transportation System

Abstract

Due to the increasing automation and digitalization level in modern semiconductor wafer facilities and the associated growing system complexity, the demands for the maintenance staff for highly automated systems are continuously increasing. In order to maintain line stability, qualified maintenance personnel are essential for fast and secure troubleshooting the highly automated transportation system of a semiconductor plant. However, the transfer of knowledge to new maintenance personnel for coping with malfunctions is a big challenge. This is also a contribution in the digital transformation in this context for training of people at highly digitized workplaces by introducing a virtual training for (new) employees. This training supports new maintenance personnel to gain practical experience in operating a modern human-machine interface without disturbing the existing productive system. Initial results indicate that this approach supports the transformation process in a targeted manner. For future work, we aim to examine other performance metrics and their impact over time.