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Si-DLC films deposited by a novel method equipped with a co-potential auxiliary cathode for anti-corrosion and anti-wear application

Materials EngineeringMaterials ScienceChemical EngineeringCorrosion ProtectionEngineeringCorrosionSurface ScienceApplied PhysicsThin FilmsSilicon On InsulatorAnti-wear ApplicationChemical Vapor DepositionSi-dlc FilmsCorrosion ResistanceThin Film ProcessingCo-potential Auxiliary Cathode