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Self-cleaning performance of in-situ ultrasound generated by quartz-based piezoelectric membrane

Materials ScienceBiomedical AcousticsQuartz-based Piezoelectric MembraneEngineeringPower UltrasoundMicrofabricationMechanical EngineeringPiezoelectric MaterialsPiezoelectricityPiezoelectric MaterialUltrasoundMicromachined Ultrasonic Transducer