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Effects of silicon doping on the chemical bonding states and properties of nitrogen-doped diamond-like carbon films by plasma-enhanced chemical vapor deposition

Materials ScienceMaterials EngineeringChemical EngineeringDiamond-like CarbonEngineeringCarbon-based MaterialChemical Bonding StatesSurface ScienceApplied PhysicsVacuum DevicePlasma ProcessingChemical Vapor Deposition