RF acoustic microsystems based on suspended lithium niobate thin films: advances and outlook

Abstract

Abstract This paper presents a review of the radio frequency thin-film lithium niobate (LiNbO 3 ) based acoustic microsystems. Thanks to their high electromechanical coupling ( k 2 ), low loss, and great frequency scalability, thin-film LiNbO 3 has outperformed state-of-the-art acoustic technologies in the past decade. This paper first reviews the acoustic wave transduction and propagation in thin-film LiNbO 3 and then showcases the emerging acoustic applications. Outlook for further platform development and more functions is offered for future thin-film LiNbO 3 based acoustic microsystems development.