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A fuzzy hierarchical reinforcement learning based scheduling method for semiconductor wafer manufacturing systems

Fuzzy LogicEngineeringIndustrial EngineeringRobust Fuzzy ProgrammingComputer EngineeringProcess ControlProduction SchedulingManufacturing PlanningManufacturing SystemsSystems EngineeringFuzzy Hierarchical ReinforcementBusinessAi-based Process OptimizationFuzzy OptimizationOperations Research