Concepedia

Publication | Open Access

UV-LED projection photolithography for high-resolution functional photonic components

DOIFull Paper Access

50

Citations

33

References

2021

Year

Lei Zheng, Urs Zywietz, Tobias Birr, Martin Duderstadt, Ludger Overmeyer, Bernhard Roth, Carsten Reinhardt
Microsystems & Nanoengineering

References

YearCitations

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