Publication | Closed Access
Evolution of pronounced ferroelectricity in Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub>thin films scaled down to 3 nm
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Citations
57
References
2021
Year
Materials ScienceFerromagnetismMultiferroicsElectrical EngineeringEngineeringFerroelectric ApplicationOxide ElectronicsApplied PhysicsQuantum MaterialsCondensed Matter PhysicsFerroelectric MaterialsPronounced FerroelectricityHigh EnduranceLow Operation VoltageThin FilmsMicroelectronicsElectrical Insulation
Thickness dependent ferroelectric characteristics of HZO are systematically demonstrated down to 3 nm, exhibiting low operation voltage and high endurance.
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