Concepedia

Evolution of pronounced ferroelectricity in Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub>thin films scaled down to 3 nm

Chin-I Wang, Hsin-Yang Chen, Chun-Yuan Wang, Teng-Jan Chang, Yu‐Sen Jiang, Chih‐Sheng Chang, Miin‐Jang Chen

Journal of Materials Chemistry C · 2021 · 39 citations · 57 references

DOI

Concepts

Abstract

Thickness dependent ferroelectric characteristics of HZO are systematically demonstrated down to 3 nm, exhibiting low operation voltage and high endurance.

References

57

The work function of the elements and its periodicity

Herbert B. Michaelson · Journal of Applied Physics · 1977 · 4.2K citations

, , +8

Applications of Modern Ferroelectrics

J. F. Scott · Science · 2007 · 3.2K citations

, , +17

Ferroelectricity in hafnium oxide thin films

T. S. Böscke, Johannes Müller, D. Bräuhaus et al. · Applied Physics Letters · 2011 · 2.7K citations

, , +17

Ferroelectricity in Simple Binary ZrO<sub>2</sub> and HfO<sub>2</sub>

Johannes Müller, T. S. Böscke, U. Schröder et al. · Nano Letters · 2012 · 1.7K citations

, , +17

Physical Mechanisms behind the Field‐Cycling Behavior of HfO<sub>2</sub>‐Based Ferroelectric Capacitors

Milan Pešić, Franz P. G. Fengler, Luca Larcher et al. · Advanced Functional Materials · 2016 · 914 citations · Full text

, , +17