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Evolution of pronounced ferroelectricity in Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub>thin films scaled down to 3 nm

37

Citations

57

References

2021

Year

Abstract

Thickness dependent ferroelectric characteristics of HZO are systematically demonstrated down to 3 nm, exhibiting low operation voltage and high endurance.

References

YearCitations

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