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Investigation of damage generation process by stress waves during femtosecond laser drilling of SiC

Damage MechanismAdvanced Laser ProcessingEngineeringLaser-induced BreakdownMechanical EngineeringApplied PhysicsDamage Generation ProcessLaser Processing TechnologySolid MechanicsLaser-assisted DepositionMechanics Of MaterialsMicrostructureLaser DamageStress Waves