Concepedia

Publication | Closed Access

Influence of grain size of Cu target on its magnetron sputtering erosion and parameters

DOI

13

Citations

11

References

2021

Year

Wenhao Yang, Guohua Zhao, Yupeng Wang, Shuai-Kang Wang, Shang-Song Zhan, Duo Wang, Mingdong Bao, Bin Tang, Lijun Yao, Xueze Wang
Journal of Materials Science Materials in Electronics

References

YearCitations

Page 1