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Improvement of oxide removal rate in chemical mechanical polishing by forming oxygen vacancy in ceria abrasives via ultraviolet irradiation

Materials ScienceMaterials EngineeringChemical EngineeringOxygen VacancyEngineeringMaterial ProcessingCorrosionCermetAbrasive ProcessSurface TreatmentChemical Mechanical PolishingMineral ProcessingOxide Removal RateAbrasive MachiningWastewater Treatment