Publication | Closed Access
Fabrication of Si3N4/Cu direct-bonded heterogeneous interface assisted by laser irradiation
29
Citations
50
References
2021
Year
Materials ScienceAdvanced Laser ProcessingEngineeringSurface ScienceApplied PhysicsSiliceneSemiconductor Device FabricationLaser-assisted DepositionLaser IrradiationSilicon On InsulatorOptoelectronics
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