Effect of bias voltage on the growth of super-hard (AlCrTiVZr)N high-entropy alloy nitride films synthesized by high power impulse magnetron sputtering - Concepedia

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Effect of bias voltage on the growth of super-hard (AlCrTiVZr)N high-entropy alloy nitride films synthesized by high power impulse magnetron sputtering

DOI Full Paper Access

91

Citations

53

References

2021

Year

Yi Xu, Guodong Li, Guang Li, Fangyuan Gao, Xia Yuan

Applied Surface Science

Materials ScienceMaterials EngineeringAluminium NitrideEngineeringN High-entropy AlloyApplied PhysicsBias VoltageMultiprincipal Element AlloyMicrostructure

References

	Year	Citations

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