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Magnetron co-sputtering optimized aluminum-doped zinc oxide (AZO) film for high-response formaldehyde sensing

Materials EngineeringMaterials ScienceChemical EngineeringAluminum-doped Zinc OxideEngineeringOxide ElectronicsGas SensorThin FilmsHigh-response Formaldehyde SensingChemical SensorElectrochemical Gas Sensor