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Effects of substrate temperature and intermediate layer on adhesion, structural and mechanical properties of coaxial arc plasma deposition grown nanodiamond composite films on Si substrates

Materials EngineeringMaterials ScienceDiamond-like CarbonEngineeringNanomaterialsNanotechnologySubstrate TemperatureApplied PhysicsComposite FilmsChemical Vapor DepositionPlasma ProcessingThin Film ProcessingIntermediate Layer