Investigation of the chemical vapor deposition of Cu from copper amidinate through data driven efficient CFD modelling - Concepedia

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Investigation of the chemical vapor deposition of Cu from copper amidinate through data driven efficient CFD modelling

DOI Full Paper Access

15

Citations

40

References

2021

Year

Rosemary Spencer, P.A. Gkinis, Eleni D. Koronaki, Dimitrios I. Gerogiorgis, Stéphane Bordas, Andreas G. Boudouvis

Computers & Chemical Engineering

Materials ScienceChemical EngineeringEfficient Cfd ModellingEngineeringCopper AmidinateModeling And SimulationChemical DepositionChemical Vapor Deposition

References

	Year	Citations

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