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Fabrication and characterization of CrNbSiTiZr high-entropy alloy films by radio-frequency magnetron sputtering via tuning substrate bias

Materials EngineeringMagnetismMaterials ScienceRadio-frequency MagnetronEngineeringMagnetic Data StorageSubstrate BiasSurface ScienceApplied PhysicsMultiprincipal Element AlloyThin Film ProcessingMagnetic Medium