Structural and gas barrier properties of hydrogenated silicon nitride thin films prepared by roll-to-roll microwave plasma-enhanced chemical vapor deposition

The hydrogen content of plasma-deposited silicon nitride

W. A. Lanford, Myron J. Rand · Journal of Applied Physics · 1978 · 782 citations

Natural Sciences, Chemistry, Materials Science +17

Chemical effects on the frequencies of Si-H vibrations in amorphous solids

G. Lucovsky · Solid State Communications · 1979 · 602 citations

Natural Sciences, Chemistry, Physics +13

Flexible OLED Displays Using Plastic Substrates

Akihiro Sugimoto, H. Ochi, Sou Fujimura et al. · IEEE Journal of Selected Topics in Quantum Electronics · 2004 · 271 citations

Natural Sciences, Materials Engineering, Materials Science +17

Detailed study of the composition of hydrogenated SiNx layers for high-quality silicon surface passivation

Helmut Mäckel, R. Lüdemann · Journal of Applied Physics · 2002 · 247 citations

Engineering, Materials Engineering, Materials Science +17

Mechanism of SiN x  H  y Deposition from  NH 3 ‐ SiH4 Plasma

Donald L. Smith, Andrew S. Alimonda, Chau‐Chen Chen et al. · Journal of The Electrochemical Society · 1990 · 246 citations

Natural Sciences, Chemistry, Materials Science +15