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Influence of the PALE growth temperature on quality of MOVPE grown AlN/Si (111)

DOI

25

Citations

62

References

2021

Year

İsmail Altuntaş, Merve Nur Koçak, Gamze Yolcu, Hasan Feyzi Budak, Ahmet Emre Kasapoğlu, Sabit Horoz, Emre Gür, İlkay Demir
Materials Science in Semiconductor Processing

References

YearCitations

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