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Optical and structural properties of aluminium nitride thin-films synthesized by DC-magnetron sputtering technique at different sputtering pressures

Materials ScienceMaterials EngineeringStructural PropertiesOptical MaterialsDc-magnetron Sputtering TechniqueDifferent Sputtering PressuresPhysicsEngineeringOptical PropertiesAluminium NitrideSurface ScienceApplied PhysicsThin FilmsChemical Vapor DepositionThin Film Processing