Micromachined Acoustic-Wave Liquid Ejectro

Abstract

This paper describes a micromachined Acoustic-Wave Liq uid Ejector (AWLE) array on silicon wafer for inkjet printing and microfluidic systems. The A WLE focuses acoustic waves (gener ated by piezoelectric ZnO thin film) through a constructive interfer ence without any lens. Initial results show that the A WLE ejects ink liquid of 20 m diameter size when driven by a 260 MHz sinusoi dal wave for 100 sec.