Publication | Closed Access
Effect of bias voltage on the microstructure and properties of Nb-DLC films prepared by a hybrid sputtering system
48
Citations
34
References
2020
Year
Materials ScienceMaterials EngineeringElectrical EngineeringNb-dlc FilmsEngineeringApplied PhysicsHybrid Sputtering SystemBias VoltageThin FilmsMicroelectronicsChemical Vapor DepositionThin Film Processing
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