Publication | Closed Access
Shape classification of fumed silica abrasive and its effects on chemical mechanical polishing
21
Citations
22
References
2020
Year
Materials ScienceMaterials EngineeringChemical EngineeringEngineeringMaterial ProcessingMechanical EngineeringShape ClassificationAbrasive ProcessSurface TreatmentChemical Mechanical PolishingMineral ProcessingSurface ProcessingAbrasive MachiningMicrostructure
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