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Effect of heat treatment on electrical and surface properties of tungsten oxide thin films grown by HFCVD technique

Materials EngineeringMaterials ScienceElectrical EngineeringHfcvd TechniqueEngineeringCorrosionOxide ElectronicsVacuum DeviceThin FilmsHeat TreatmentChemical Vapor DepositionThin Film ProcessingElectrical Insulation